Equipment

  • IBS Optical Coater (Oxford) Ionfab500

Specification
Target size 14 inch
Number of target 2
Platen size Rotating planetary (4 x 10")
End point detection Dual Xtal monitors
Platen rotation Up to 20 rpm
Ion source 15 cm RF
  • Bast Machine (Fuji manufacturing) SGK-5

  • Recirculating Chillers (Neslab) HX500
  • Recirculating Chillers (Neslab) HX150
  • Ultrasonic Washer (Yamato Scientific) Bransonic1210
  • Oven(Yamato Scientific)DN43H
  • Muffle Furnace(Yamato Scientific)FP310
  • Insulation Tester(Yokogawa Electric)2426A
  • Surface Profiler(Oxford)AlphaStep500

  • Illuminater for Naked-eye Inspection(Olympus)WA-LSH
  • Ultrasonic Washer(SPC Electronics)ACL-201A1-33A
  • Air Compressor(Mitsui Seiki)ZS065
  • Clean Booth(Airtech Japan)
  • Clean Bench
  • Microscope(Olympus)BX60
  • Digital Microscope Camera(Olympus)DP11-N
  • Ultrasonic Washer(Kaijo)Phenix400
  • Spectrophotometer(PerkinElmer)Lambda900UV/VIS/NIR

  • Reference Flat(Melles Griot)lambda/50
  • Ultrasonic Washer(Suzuki)SUC900A
  • Bench Lathe(Mechanix)L180V
  • Drilling Machine(Kira)KND-8
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